Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision |
| e-beam_evaporator [2025/12/03 10:32] – [Common errors] fabian | e-beam_evaporator [2025/12/03 16:13] (current) – [Common errors] fabian |
|---|
| |
| |
| ==== Common errors ==== | ===== Common errors ===== |
| |
| * Discharge failure? If the power source shows the HLP26 or HLP27 error, reset the power source by pressing the button the says ''Discharge Enable / Standby''. A common cause for a discharge error is insufficient Ar pressure. A pressure of 3.8e-4 mbar is the lower boundary for a stable emission. At 3.7e-4 mbar to 3.6e-4 mbar there are insufficient Ar atoms for the IBG to maintain a stable discharge. An Ar flow rate of 3.0 sccm is sufficient, 2.5 sccm is on the lower end and might not be enough. **Note:** Pressure typically drops by 0.1e-4 mbar to 0.2e-4 mbar during etching over a scale of 1 to 3 minutes. Keep this in mind when selecting flow rate. | * **IBG discharge failure.** If the ion beam gun power source shows the HLP26 or HLP27 error, reset the power source by pressing the button the says ''Discharge Enable / Standby'' with the label ''Reset'' next to it. A common cause for a discharge error is insufficient Ar pressure. A pressure of 3.8e-4 mbar is the lower boundary for a stable emission. At 3.7e-4 mbar to 3.6e-4 mbar there are insufficient Ar atoms for the IBG to maintain a stable discharge. An Ar flow rate of 3.0 sccm is sufficient, 2.5 sccm is on the lower end and might not be enough. **Note:** Pressure typically drops by 0.1e-4 mbar to 0.2e-4 mbar during etching over a scale of 1 to 3 minutes. Keep this in mind when selecting flow rate. |
| |
| |
