The NanoLab is the MSM group's infrastructure for the fabrication of submicron structures of metals and oxides. The MSM group is part of the Kamerlingh Onnes Laboratory of the Leiden institute of physics.

The NanoLab equipment for thin film deposition, lithography, etching, inspection and other processing equipment can be found on the facilities page.

The MSM wiki is a system of web pages that can be read, improved and extended by everyone who has access to them and functions as the group's common knowledge base. Access is limited to selected local users only.

• Equipment manuals
• Deposition processes and rates
• Resist and e-beam recipes
• Optical lithography recipes
• Ion etching recipes and rates
• Wet etching recipes and rates

• Safety and lab regulations
• Working with chemicals

(this section is completely out of date)

• MSM Papers
• Recent papers
• Group meeting talks
• Student reports
• Relevant literature
• Books
• Conference talks

• Latex links and examples
• Software and Computers
• Cables and connectors

Contact Marcel Hesselberth if you have questions about this documentation system or want to add new pages. Edit a page only if you are sure you will improve it (read how).