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optical_lithography

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Description

To start

  1. Because the UV lamp needs some time to warm up, you should switch on the mask aligner first.
    1. Switch on power and UV source
    2. Wait for 10 minutes
    3. In the meanwhile you can spincoat resist and bake it
  2. Switch on the hot plate now (there is a switch at the left)
  3. Adjust temperature with large knob
  4. Desired temperature depends on the kind of resist you use.

Spin coater

The spin coater has 2 standard recipes. To change recipe, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.

1 2
3 4
5 6
7 8
9 10

To change the recipe press the buttons in the following way:

  1. 1 edit
  2. 10 change recipe
  3. 7 (-) or 8 (+) to adjust
  4. 2 end edit
  5. use recipe 1 or 2 for optical resist

Hot plate

  1. put the sample on the hot plate and time the process
  2. the time you need depends on the kind of resist

Mask aligner

  1. When you can see the blue light shining from the back, the lamp is warm.
  2. Put the mask in the mask holder, upside down, because in this way the side with the structure on it will be in contact with your sample.

Development

optical_lithography.1216894126.txt.gz · Last modified: 2008/07/24 10:08 by knaap

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