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| z-400_deposition_rates [2016/12/23 08:38] – mechielsen | z-400_deposition_rates [2018/05/04 11:53] (current) – removed scholma |
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| ===== Z-400 Deposition rates ===== | |
| This is the full list of Z-400 deposition rates, only **add** items here. | |
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| ^ Material ^ Date ^ User ^ Process parameters ^ Measurement ^ Result ^ Rate ^ | |
| | Al | 20080514 | Jorina | 25% Ar, 1kV, 10min | X-ray | 80 nm | 8 nm/min | | |
| | Al | 20100520 | Boltje | ~25% Ar (4e-3 mbar), 500V, 10 min| X-ray | 25.6 nm | 2.6 nm/min | | |
| | Al | 20110606 | Boltje | 50 sccm Ar, 1kV, 4 min | X-ray | 38 nm | 9.5 nm/min | | |
| | Al | 20120522 | Boltje | 50 sccm Ar, 1kV, 148 s | X-ray | 22.5 nm | 9.1 nm/min | | |
| | Al<sub>2</sub>O<sub>3</sub> | 20050127 | Gertjan | 25% Ar, 1kV, 2 min | RBS | 8 nm | 4 nm/min | | |
| | Al<sub>2</sub>O<sub>3</sub> | 20100519 | Boltje | ~25% Ar (4e-3 mbar), 1kV, 15 min | X-ray | 32.4 nm | 2.2 nm/min | | |
| | Al<sub>2</sub>O<sub>3</sub> | 20111028 | Boltje | 50 sccm Ar, 0.5kV, 15min | X-ray | 10.7 nm | 0.71 nm/min | | |
| | Al<sub>2</sub>O<sub>3</sub> | 20120606 | Boltje | 60 sccm Ar, 10% O<sub>2</sub>, 1kV, xx min | X-ray | 9.2 nm | 1.8 nm/min | | |
| | Ag | 20111014 | Boltje | 50 sccm Ar, 1kV, 2min | X-ray | 38.2 nm | 19.1 nm/min | | |
| | Au | 20100330 | Boltje | 25% Ar, 1kV, 3min | X-ray | 54.3 nm | 18.1 nm/min | | |
| | Au | 20110202 | Boltje | 50 sccm Ar, 1kV, 2min | X-ray | 29.1 nm | 14.6 nm/min | | |
| | Au | 20111206 | Boltje | 50 sccm Ar, 1kV, Xmin | X-ray | 51.4 nm | 15.0 nm/min | | |
| | Au | 20120402 | Boltje | 50 sccm Ar, 1kV, 80sec | X-ray | 19.2 nm | 14.4 nm/min | | |
| | Co | 20100331 | Boltje | 25% Ar, 1kV, 3min | X-ray | 16.5 nm | 5.5 nm/min | | |
| | Co | 20110104 | Boltje | 50 sccm Ar, 1kV, 10min | X-ray | 63.9 nm | 6.4 nm/min | | |
| | Co | 20111207 | Boltje | 50 sccm Ar, 1kV, 545sec | X-ray | 63.1 nm | 6.95 nm/min | | |
| | Cr | 20090709 | Boltje | 25% Ar, 1kV, 4min | X-ray | 30 nm | 7.5 nm/min | | |
| | Cu | 20100203 | Boltje | 25% Ar, 1kV, 5min | X-ray | 63 nm | 12.6 nm/min | | |
| | Cu | 20110111 | Boltje | 50 sccm Ar, 1kV, 5min | X-ray | 57.6 nm | 11.5 nm/min | | |
| | Cu | 20111206 | Boltje | 50 sccm Ar, 1kV, 5min | X-ray | 58.2 nm | 13.4 nm/min | | |
| | Cu | 20120404 | Boltje | 50 sccm Ar, 1kV, 5min | X-ray | 51.5 nm | 10.3 nm/min | | |
| | Cu | 20120606 | Boltje | 50 sccm Ar, 1kV, 3 min | X-ray | 37.6 nm | 12.5 nm/min | | |
| | Cu-etch | 20120606 | Boltje | 50 sccm Ar, 60W, 3 min, (37.6-35.5 nm) | X-ray | 2.1 nm | 0.7 nm/min | | |
| | Fe | 20100407 | Boltje | 25% Ar, 1kV, 4min | X-ray | 22.0 nm | 5.5 nm/min | | |
| | Py | 20161223 | Mechielsen| 50 sccm, 1kV, | AFM | nm | 7.9 nm/min | | |
| | MoGe | 2007 | Edoardo | 25% Ar, 1kV, 15mins no pauses, silver paint | X-ray | 84.2 nm | 5.6 nm/min | | |
| | MoGe | 02042008 | Ivan & Edo| 25% Ar, 1kV, 18 mins pauses (1min) | X-ray | 86 nm | 4.8 nm/min | | |
| | MoGe | 15042011 | Boltje | 50 sccm Ar, 1kV, 10min | X-ray | 55.3 nm | 5.5 nm/min | | |
| | MoGe* | 16082011 | Boltje | 50 sccm Ar, 1kV, 10min | X-ray | 51.5 nm | 5.2 nm/min | | |
| |Nb<sub>65</sub>Ge<sub>35</sub> | 2004 | Tibi | 25% Ar, 1kV, 6 min, <3e-6 mbar | X-ray | 28 nm | 4.67 nm/min | | |
| |Nb<sub>65</sub>Ge<sub>35</sub> | 2005 | Bas v Leewuwen | 25% Ar, 1kV | X-ray | - | 4.89 nm/min | | |
| | [[NbN]] | 20050126 | Gertjan | 1.7 kV, 18 % Ar, 10% N2, 8 min, blend | RBS/X-ray | 60/75nm| 7.5-9 nm/min | | |
| | [[NbN]] | 20050124 | Olaf | 1.0 kV 18% Ar, 10% N2, no blend, 1356s| X-ray | 49.5 nm| 2.2 nm/min | | |
| | [[NbN]] | 20080310 | Jorina | 1.0 kV, 18 % Ar, 10% N2, 22min 42s, no blend | X-ray | 55.15 nm | 2.4 nm/min | | |
| | [[NbN]] | 20111212 | Boltje | 1.0 kV, 18% Ar, 10% N2, x min, no blend | X-ray | 71.3 nm | 3.56 nm/min | | |
| | Ni | 20110114 | Boltje | 50 sccm Ar, 1kV, 9min | X-ray | 58.8 nm | 6.5 nm/min | | |
| | NiGd | 20051024 | ? | 25% Ar, 1kV | X-ray | 67.5 nm | 6.8 nm/min | | |
| | Pt | 20061113 | Chris | 25% Ar, 0.5kV, 2mins | X-ray | 5.0 nm | 2.5 nm/min | | |
| | Pt | 20110307 | Boltje | 50 sccm Ar, 0.5kV, 10 min | X-ray | 15.6 nm | 1.56 nm/min | | |
| | Pt | 20120612 | Boltje | 50 sccm Ar, 1kV, 10 min | X-ray | 67.9 nm | 6.8 nm/min | | |
| | Si3N4 | 20110609 | Boltje | 50 sccm Ar, 1kV, 8 min | X-ray | 31.8 nm | 4.0 nm/min | | |
| | Si3N4 | 20120522 | Boltje | 50 sccm Ar, 1kV, 469 s | X-ray | 36.0 nm | 4.6 nm/min | | |
| | W | 20060116 | Vincent | 25% Ar, 1kV | X-ray | 38.5 nm | 3.9 nm/min | | |
