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Z-400 Deposition rates

This is the full list of Z-400 deposition rates, only add items here.

Material	Date	User	Process parameters	Measurement	Result	Rate
Al	20080514	Jorina	25% Ar, 1kV, 10min	X-ray	80 nm	8 nm/min
Al	20100520	Boltje	~25% Ar (4e-3 mbar), 500V, 10 min	X-ray	25.6 nm	2.6 nm/min
Al	20110606	Boltje	50 sccm Ar, 1kV, 4 min	X-ray	38 nm	9.5 nm/min
Al	20120522	Boltje	50 sccm Ar, 1kV, 148 s	X-ray	22.5 nm	9.1 nm/min
Al₂O₃	20050127	Gertjan	25% Ar, 1kV, 2 min	RBS	8 nm	4 nm/min
Al₂O₃	20100519	Boltje	~25% Ar (4e-3 mbar), 1kV, 15 min	X-ray	32.4 nm	2.2 nm/min
Al₂O₃	20111028	Boltje	50 sccm Ar, 0.5kV, 15min	X-ray	10.7 nm	0.71 nm/min
Al₂O₃	20120606	Boltje	60 sccm Ar, 10% O₂, 1kV, xx min	X-ray	9.2 nm	1.8 nm/min
Ag	20111014	Boltje	50 sccm Ar, 1kV, 2min	X-ray	38.2 nm	19.1 nm/min
Au	20100330	Boltje	25% Ar, 1kV, 3min	X-ray	54.3 nm	18.1 nm/min
Au	20110202	Boltje	50 sccm Ar, 1kV, 2min	X-ray	29.1 nm	14.6 nm/min
Au	20111206	Boltje	50 sccm Ar, 1kV, Xmin	X-ray	51.4 nm	15.0 nm/min
Au	20120402	Boltje	50 sccm Ar, 1kV, 80sec	X-ray	19.2 nm	14.4 nm/min
Co	20100331	Boltje	25% Ar, 1kV, 3min	X-ray	16.5 nm	5.5 nm/min
Co	20110104	Boltje	50 sccm Ar, 1kV, 10min	X-ray	63.9 nm	6.4 nm/min
Co	20111207	Boltje	50 sccm Ar, 1kV, 545sec	X-ray	63.1 nm	6.95 nm/min
Cr	20090709	Boltje	25% Ar, 1kV, 4min	X-ray	30 nm	7.5 nm/min
Cu	20100203	Boltje	25% Ar, 1kV, 5min	X-ray	63 nm	12.6 nm/min
Cu	20110111	Boltje	50 sccm Ar, 1kV, 5min	X-ray	57.6 nm	11.5 nm/min
Cu	20111206	Boltje	50 sccm Ar, 1kV, 5min	X-ray	58.2 nm	13.4 nm/min
Cu	20120404	Boltje	50 sccm Ar, 1kV, 5min	X-ray	51.5 nm	10.3 nm/min
Cu	20120606	Boltje	50 sccm Ar, 1kV, 3 min	X-ray	37.6 nm	12.5 nm/min
Cu-etch	20120606	Boltje	50 sccm Ar, 60W, 3 min, (37.6-35.5 nm)	X-ray	2.1 nm	0.7 nm/min
Fe	20100407	Boltje	25% Ar, 1kV, 4min	X-ray	22.0 nm	5.5 nm/min
Py	20161223	Mechielsen	50 sccm, 1kV,	AFM	nm	7.9 nm/min
MoGe	2007	Edoardo	25% Ar, 1kV, 15mins no pauses, silver paint	X-ray	84.2 nm	5.6 nm/min
MoGe	02042008	Ivan & Edo	25% Ar, 1kV, 18 mins pauses (1min)	X-ray	86 nm	4.8 nm/min
MoGe	15042011	Boltje	50 sccm Ar, 1kV, 10min	X-ray	55.3 nm	5.5 nm/min
MoGe*	16082011	Boltje	50 sccm Ar, 1kV, 10min	X-ray	51.5 nm	5.2 nm/min
Nb₆₅Ge₃₅	2004	Tibi	25% Ar, 1kV, 6 min, <3e-6 mbar	X-ray	28 nm	4.67 nm/min
Nb₆₅Ge₃₅	2005	Bas v Leewuwen	25% Ar, 1kV	X-ray	-	4.89 nm/min
NbN	20050126	Gertjan	1.7 kV, 18 % Ar, 10% N2, 8 min, blend	RBS/X-ray	60/75nm	7.5-9 nm/min
NbN	20050124	Olaf	1.0 kV 18% Ar, 10% N2, no blend, 1356s	X-ray	49.5 nm	2.2 nm/min
NbN	20080310	Jorina	1.0 kV, 18 % Ar, 10% N2, 22min 42s, no blend	X-ray	55.15 nm	2.4 nm/min
NbN	20111212	Boltje	1.0 kV, 18% Ar, 10% N2, x min, no blend	X-ray	71.3 nm	3.56 nm/min
Ni	20110114	Boltje	50 sccm Ar, 1kV, 9min	X-ray	58.8 nm	6.5 nm/min
NiGd	20051024	?	25% Ar, 1kV	X-ray	67.5 nm	6.8 nm/min
Pt	20061113	Chris	25% Ar, 0.5kV, 2mins	X-ray	5.0 nm	2.5 nm/min
Pt	20110307	Boltje	50 sccm Ar, 0.5kV, 10 min	X-ray	15.6 nm	1.56 nm/min
Pt	20120612	Boltje	50 sccm Ar, 1kV, 10 min	X-ray	67.9 nm	6.8 nm/min
Si3N4	20110609	Boltje	50 sccm Ar, 1kV, 8 min	X-ray	31.8 nm	4.0 nm/min
Si3N4	20120522	Boltje	50 sccm Ar, 1kV, 469 s	X-ray	36.0 nm	4.6 nm/min
W	20060116	Vincent	25% Ar, 1kV	X-ray	38.5 nm	3.9 nm/min