NanoWiki

1. Chiller temp can be measured (D connector has 0-10V in and out, conversion to C has a weird 10C offset) build thermometer for this
2. Install new baratron (expected 20060915)
3. Connect pump exhaust, gaspod and gas cabinet to building exhaust (vastgoed)
4. Detailed vacuum leak tests
5. MFC calibration for gases used
6. Change 380V wall socket plug (25A, 4 mm2 wires)
7. Build PL7 interlock box
8. Get 2 25cm diameter (very pure) quartz wafers (Chris)
9. Repair or replace vacustat

1. MFC's swapped, O2 and Ar are calibrated for those gases, vacuum leaktest OK (0.0 mtorr/min)
2. Green gasline to 607 cut & sealed, now dedicated for O2 of both etchers
3. Burned 2 CD's with mirror of Oxford PC installation
4. BAM made the planning for the building exhaust line

• Chamber pumped to 4e-6 mbar, OK
• Overpressure tests of SF6, CF4, O2 and Ar lines performed (6 bar), no failures, no leaks
• Vacuum tests of all gaslines, all 0.0 mtorr/min (chamber) leak rate but mass flow controllers still have to be swapped
• Backups of computer made

• System installed
• Reactor removed from chamber, fully disassembled and cleaned
• Chamber turbo cleaning / revision
• VAT valve disassembly / cleaning
• MKS control valve disassembly cleaning
• Rough vacuum hoses and connectors disassembled/cleaned
• Leybold valves cleaned
• Pressure gauges cleaned, new baratron ordered
• Gas line overpressure tests (6 bar)
• Gas line overpressure leak tests (no measurable loss overnight)
• System reassembled
• Test run

BCl3 residue easily soluble in water