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[{"$nulls":12},"MATERIAL PARAMETERS"]
[null,"CALCULATION OF SPUTTERING RATE ",{"$nulls":4},"z/t = M/(rNAe) x S jp",{"$nulls":5},"Nb",null,"Ag",null,"Au"]
[{"$nulls":6},"M: molar weight of the target [kg/mol] ",{"$nulls":5},0.093,null,0.108,null,0.197]
[{"$nulls":6},"r: density of the material [kg/m3] ",{"$nulls":5},8570,null,10500,null,19000]
[null,"V=500 eV",{"$nulls":4},"NA: 6.02 x 1026 1/kmol; (Avogadro number)",{"$nulls":4},6.02e+23]
[null,"Emission current is fixed at 10 mA",{"$nulls":4},"e: 1.6x 10-19 As (electron charge)",{"$nulls":4},1.602e-19]
[null,"Pressure = 2E-5 mbar",{"$nulls":4},"S: sputtering yield (atom/ion) from SPECS manual (@ 500 eV)",{"$nulls":5},0.5,null,3,null,2]
[{"$nulls":6},"jp: primary ion current density [A/m2]",{"$nulls":4},1]
[]
[]
[null,"Sample current (A)",null,null,1.5e-05,null,"Sputter rate"," m/s",{"$nulls":4},5.6261735925879934e-11,null,3.199607514811517e-10,null,2.1502235686769402e-10]
[null,"Sputter spot diameter (m)",null,null,0.005]
[]
[null,"Area = ",null,null,1.9625000000000003e-05,null,"Sputter rate m/minute",{"$nulls":5},3.375704155552796e-09,null,1.9197645088869102e-08,null,1.290134141206164e-08]
[]
[null,"Ion current (A/m2)",null,null,0.7643312101910827]

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