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OLDER RATES

Material	Date	Sample ID	Process parameters	Measured with	Result	Rate
Al	20040513	Cristianne	6e-3mbar, 220mA	RBS	-	6.34A/nm
Al	20050324	Sample3	6e-3mbar, 200mA, 5mins	X-ray	116nm	23.2nm/min
Al	20050628	Machiel	2.5e-3mbar, 200mA, 415V, 269deg, 6min	X-ray	128nm (640A Xthal)	3.56 A/s (1.78 A/s)
Al	20060329	Chris	4e-3mbar, 200mA, 357V, 45deg AWAY from target, 15min	X-ray	44.5nm (1180A Xthal)	2.97 nm/min (78.7 nm/min)
Nb	20030404	Sasha	6e-3mbar, 220mA	X-ray	-	6.19A/nm
Nb	20050125	Nb2	4e-3mbar, 220mA, 340V, 3min	X-ray	22.5nm	1.1A/s
Nb	20050922	220905	4e-3mbar, 220mA, 360V, 10min	X-ray	68nm	1.13A/s
Nb	20051507	Machiel	4.0e-3mbar, 220mA, 305V, 224deg, 15min	X-ray	73nm (554A Xthal)	0.81 A/s (0.62 A/s)
Nb	20051111	Carla	4.0e-3mbar, 220mA, 224deg, 3min	X-ray	21.26	1.18 A/s
Nb	20060913	13_9_6_3	4.0e-3 mbar, 220 mA, 10 min	X-ray	71.8 nm	48.6 nm	7.2 nm/min
Nb	20060918	18_9_6_6	4.0e-3 mbar, 220 mA, 10 min	α-stepper	74 nm	46.2 nm	7.4 nm/min
Nb	20070302	NbCal	4.0e-3 mbar, 220 mA, 4.2 min	X-ray	26.0 nm	16.7 nm	6.2 nm/min
Nb	20070924	Cal_07_Nb	4.0e-3 mbar, 220 mA, 8 min	X-ray	55.6 nm	33.8 nm	6.7 nm/min
PdNi	20040915	PN1	4e-3mbar, 200mA, 532V, 5min	X-ray	69.4nm	13.88 nm/min
PdNi	20050125	P8	4e-3mbar, 200mA, 518V, 90sec	X-ray	20.0nm	2.14 A/s
CuNi	20051130	CN1	4e-3mbar, 70mA, 760V, 270sec	X-ray	10.9nm	0.40 A/s
CuNi (back of old one)	20061130	30_11_6_2 and 3	4e-3mbar, 70mA, 2 mins and 5mins	Xray	5.2nm and 12.4nm (45 and 112A Xtal)	Average 2.54 nm/min
Py	20040226	Christianne	4e-3mbar, 165mA	X-ray	-	1 nm/5.9sec
Py	20040809	Christianne	4e-3mbar, 165mA	X-ray	-	2.54A/nm
Py	20050317	Youri	6e-3mbar, 200mA, 4min48s	X-ray	57.8nm	2.72A/nm
Py	20050628	Machiel	2.5e-3mbar, 165mA, 485V, 179deg, 10min	X-ray	122nm (337A Xthal)	2.03 A/s (0.56 A/s)