optical_lithography
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Table of Contents
Description
To start
- Because the UV lamp needs some time to warm up, you should switch on the mask aligner first.
- Switch on power and UV source
- Wait for 10 minutes
- In the meanwhile you can spincoat resist and bake it
- Switch on the hot plate now (there is a switch at the left)
- Adjust temperature with large knob
- Desired temperature depends on the kind of resist you use.
Spin coater
The spin coater has 2 standard recipes. To change recipe, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.
| 1 | 2 |
|---|---|
| 3 | 4 |
| 5 | 6 |
| 7 | 8 |
| 9 | 10 |
To change the recipe press the buttons in the following way:
- 1 edit
- 10 change recipe
- 7 (-) or 8 (+) to adjust
- 2 end edit
- use recipe 1 or 2 for optical resist
Mask aligner
Hot plate
Development
optical_lithography.1216893549.txt.gz · Last modified: 2008/07/24 09:59 by knaap