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Material	Date	Sample ID	Process parameters	Measured with	Result	Rate
Cr	20100929	CronSi	5 mTorr, 100 mA, 15 min	X-ray	20.1 nm	1.34 nm/min
Cr*	20110713	Cr_cal	2 mTorr, 100 mA, 10 min	X-ray	19.0 nm	1.90 nm/min
Cr	20101129	Cronglass	2 mTorr, 100mA, 250°C, 32m29s	X-ray	62.5 nm	1.92 nm/min
Cr	20110110	Cr-03403	2 mTorr, 150mA, 250°C, 10m30s	X-ray	29.5 nm	2.81 nm/min
Cr	20110111	Cr-03501	2 mTorr, 200mA, 250°C, 10 min	X-ray	39.6 nm	3.96 nm/min
SmCo₅	20100929	SmCo₅onSi	5 mTorr, 100mA, 15 min	X-ray	31.8 nm	2.12 nm/min
SmCo₅	20110324	Sm_019_cal	16 mTorr, 150mA, 10 min	X-ray	8.80 nm	0.88 nm/min
SmCo₅*	20110816	Sm_051_cal	02 mTorr, 200mA, 10 min	X-ray	50.1 nm	5.01 nm/min
SmCo₅*	20110823	Sm_052_cal	03 mTorr, 200mA, 10 min 10s	X-ray	40.0 nm	3.93 nm/min
SmCo₅*	20110816	Sm_050_cal	04 mTorr, 200mA, 10 min 05s	X-ray	40.5 nm	4.02 nm/min
SmCo₅*	20110…	Sm_053_cal	05 mTorr, 200mA, 10 min	X-ray	36.6 nm	3.66 nm/min
SmCo₅*	20110817	Sm_049_cal	06 mTorr, 200mA, 10 min	X-ray	34.9 nm	3.49 nm/min
SmCo₅	20110324	Sm_020_cal	12 mTorr, 200mA, 10 min	X-ray	18.2 nm	1.82 nm/min
SmCo₅*	20110705	Sm_045_cal	14 mTorr, 200mA, 10 min 30s	X-ray	18.9 nm	1.80 nm/min
SmCo₅	20110324	Sm_021_cal	16 mTorr, 200mA, 10 min	X-ray	13.1 nm	1.31 nm/min
SmCo₅*	20110712	Sm_047_cal	08 mTorr, 250mA, 10 min	X-ray	38.3 nm	3.83 nm/min
SmCo₅*	20110712	Sm_048_cal	10 mTorr, 250mA, 10 min	X-ray	32.6 nm	3.26 nm/min
SmCo₅*	20110704	Sm_038_cal	12 mTorr, 250mA, 10 min 10s	X-ray	29.0 nm	2.85 nm/min
SmCo₅	20110330	Sm_026_cal	14 mTorr, 250mA, 10 min	X-ray	19.2 nm	1.92 nm/min
SmCo₅*	20110713	Sm_042_cal	14 mTorr, 250mA, 10 min	X-ray	23.7 nm	2.37 nm/min
SmCo₅	20110324	Sm_022_cal	16 mTorr, 250mA, 10 min	X-ray	18.2 nm	1.82 nm/min
SmCo₅*	20110713	Sm_044_cal	16 mTorr, 250mA, 10 min	X-ray	20.4 nm	2.04 nm/min
SmCo₅	20110330	Sm_025_cal	18 mTorr, 250mA, 10 min	X-ray	14.2 nm	1.42 nm/min
SmCo₅	20110330	Sm_024_cal	20 mTorr, 250mA, 10 min	X-ray	12.3 nm	1.23 nm/min
SmCo₅	20110330	Sm_027_cal	24 mTorr, 250mA, 10 min	X-ray	10.3 nm	1.03 nm/min