ebpg_raith
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Table of Contents
Recipe
ARN7700.008
- spin at 4000rpm
- bake at 85ºC for 1 min
- e-beam 20kV at least 24ųC/cm^2
- prebake 100ºC for 2 min
- develop AR300-47 30s
- stop demiwater 30s
ARP672.045
- spin at 4000rpm
- bake at 180ºC for 2 min
- e-beam 20kV
- develop MIBK/IPA (1:3) 40s
- stop IPA 30s
ebpg_raith.1344441005.txt.gz · Last modified: 2012/08/08 15:50 by voltan