NanoWiki

This page is read only. You can view the source, but not change it. Ask your administrator if you think this is wrong.
====== OLDER RATES ======


^ Material ^  Date     ^ Sample ID ^ Process parameters           ^ Measured with  ^ Result ^ Rate          ^
| Al       | 20040513  | Cristianne | 6e-3mbar, 220mA              | RBS           | -      | 6.34A/nm     |
| Al       | 20050324  | Sample3    | 6e-3mbar, 200mA, 5mins       | X-ray         | 116nm      | 23.2nm/min     |
| Al       | 20050628  | Machiel    | 2.5e-3mbar, 200mA, 415V, 269deg, 6min  | X-ray         | 128nm (640A Xthal)| 3.56 A/s (1.78 A/s)|
| Al       | 20060329  | Chris    | 4e-3mbar, 200mA, 357V, 45deg AWAY from target, 15min  | X-ray         | 44.5nm (1180A Xthal)| 2.97 nm/min (78.7 nm/min)|
| Al                   | 20060913 | 13_9_6_5    | 4.0e-3 mbar, 200 mA, 5 min, tilted  | X-ray       | 110 nm      | 46.8 nm | 22 nm/min     |
| Al                   | 20060918 | 18_9_6_1    | 4.0e-3 mbar, 200 mA, 5 min, tilted  | α-stepper   | 112-115 nm  | 45.9 nm | 22.8 nm/min   |

| Co                  | 20111215 | CoUHVcal    | 4.0e-3 mbar, 200 mA, 4 min  | X-ray       | 33.9 nm | 8.48 nm/min     |
| Co                  | 20120208 | CoUHV100mA  | 4.0e-3 mbar, 100 mA, 5 min  | X-ray       | 21.0 nm | 4.20 nm/min     |
| Co                  | 20120209 | CoUHV50mA   | 4.0e-3 mbar, 50 mA, 5 min   | X-ray       | 10.3 nm | 2.06 nm/min     |
| Co                  | 20120716 | UHV-Co-300s   | 4.0e-3 mbar, xxx mA, 300 s  | X-ray       | 44.1 nm | 8.8  nm/min     |
| Co                  | 20120716 | UHV-Co-300s   | 4.0e-3 mbar, xxx mA, 300 s  | X-ray       | 44.1 nm | 8.8  nm/min     |
| Co                  | 20130301 | Co-25mA    | 4.0e-3 mbar,  25 mA, 1800 s | X-ray       | 23.5 nm | 0.783 nm/min     |
| Co                  | 20130130 | Co-100mA   | 4.0e-3 mbar, 100 mA, 485 s  | X-ray       | 29.2 nm | 3.61  nm/min     |
| Co                  | 20130130 | Co-200mA   | 4.0e-3 mbar, 200 mA, 300 s  | X-ray       | 41.5 nm | 8.31  nm/min     |
| Co                  | 20130513 | Co-100mA   | 4.0e-3 mbar, 100 mA, 600 s  | X-ray       | 34.79 nm | 3.479  nm/min     |
| Co                  | 20130625 | Co_10m     | 4.0e-3 mbar, 100 mA, 600 s  | X-ray       | 35.3 nm  | 3.53  nm/min     |
| Co                  | 20140321 | Co_50nm    | 4.0e-3 mbar, 100 mA, 850 s, 45 deg  | X-ray       | 50.77 nm | 3.58  nm/min     |

| Cu                  | 20120513 | Cu         | 4.0e-3 mbar, 65  mA, 180 s  | X-ray       | 34.13 nm | 11.37 nm/min     |
| Cu                  | 20111219 | CuUHVcal    | 4.0e-3 mbar, 165 mA, 1.5 min  | X-ray       | 27.0 nm | 18.0 nm/min     |
| Cu                  | 20120716 | UHV-Cu-120s   | 4.0e-3 mbar, xxx mA, 120 s  | X-ray       | 70.1 nm | 35.1 nm/min     |
| Cu                  | 20120716 | UHV-Cu-120s   | 4.0e-3 mbar, xxx mA, 120 s  | X-ray       | 70.1 nm | 35.1 nm/min     |
| Cu                  | 20130130 | Cu         | 4.0e-3 mbar, 65  mA, 180 s  | X-ray       | 33.9 nm | 11.30 nm/min     |
| Cu                  | 20120625 | Cu_3m      | 4.0e-3 mbar, 65  mA, 180 s  | X-ray       | 32.2 nm  | 10.73 nm/min     |

| CuNi                 | 20070924 | Cal_07_CuNi | 4.0e-3 mbar, 70 mA, 20 min          | X-ray       | 47.7 nm     | 42.5 nm | 2.4 nm/min    |
| Cu_50Ni_50           | 20110712 | CuNi_cal    | 4.0e-3 mbar, 70 mA, 20 min          | X-ray       | 40.2 nm     | -       | 2.0 nm/min    |
| CuNi     | 20051130  | CN1        | 4e-3mbar, 70mA, 760V, 270sec  | X-ray         | 10.9nm | 0.40 A/s |
| CuNi (back of old one)      | 20061130  | 30_11_6_2 and 3| 4e-3mbar, 70mA, 2 mins and 5mins              | Xray| 5.2nm and 12.4nm (45 and 112A Xtal)     | Average 2.54 nm/min|

| FeMn                 | 20060913 | 13_9_6_6    | 4.0e-3 mbar, 200 mA, 10 min         | X-ray       | 75 nm       | 49.3 nm | 7.5 nm/min    |
| FeMn                 | 20060918 | 18_9_6_2    | 4.0e-3 mbar, 200 mA, 11 min         | α-stepper   | 75-80 nm    | 53.2 nm | 7.1 nm/min    |
| FeMn<sub>50/50</sub> | 20080404 | FeMn        | 4.0e-3 mbar, 200 mA, 3.5 min        | X-ray       | 75.6 nm     | 90.7 nm | 21.6 nm/min   |
| Fe_50Mn_50           | 20110712 | FeMn_cal    | 4.0e-3 mbar, 200 mA, 5.0 min        | X-ray       |      nm     | -       |      nm/min   |

| Ho                  | 20130130 | Ho         | 4.0e-3 mbar, 40  mA, 600 s  | X-ray       | 48.5 nm | 4.85  nm/min     |

| Nb                  | 20130130 | Nb         | 4.0e-3 mbar, 200 mA, 480 s  | X-ray       | 24.8 nm | 3.1  nm/min     |
| Nb       | 20030404  | Sasha      | 6e-3mbar, 220mA              | X-ray         | -      | 6.19A/nm     |
| Nb       | 20050125  | Nb2      | 4e-3mbar, 220mA, 340V, 3min    | X-ray         | 22.5nm  | 1.1A/s     |
| Nb       | 20050922  | 220905      | 4e-3mbar, 220mA, 360V, 10min    | X-ray         | 68nm  | 1.13A/s     |
| Nb       | 20051507  | Machiel    | 4.0e-3mbar, 220mA, 305V, 224deg, 15min  | X-ray         | 73nm (554A Xthal)| 0.81 A/s (0.62 A/s)|
| Nb       | 20051111  | Carla    | 4.0e-3mbar, 220mA, 224deg, 3min  | X-ray         | 21.26 | 1.18 A/s |
| Nb                   | 20060913 | 13_9_6_3    | 4.0e-3 mbar, 220 mA, 10 min         | X-ray       | 71.8 nm     | 48.6 nm | 7.2 nm/min    |
| Nb                   | 20060918 | 18_9_6_6    | 4.0e-3 mbar, 220 mA, 10 min         | α-stepper   | 74 nm       | 46.2 nm | 7.4 nm/min    |
| Nb                   | 20070302 | NbCal       | 4.0e-3 mbar, 220 mA, 4.2 min        | X-ray       | 26.0 nm     | 16.7 nm | 6.2 nm/min    |
| Nb                   | 20070924 | Cal_07_Nb   | 4.0e-3 mbar, 220 mA, 8 min          | X-ray       | 55.6 nm     | 33.8 nm | 6.7 nm/min    |
| Nb                   | 20090709 | Nb_Simon    | 4.0e-3 mbar, 220 mA, 4 min          | X-ray       | 27.8 nm     | 18.8 nm | 6.7 nm/min    |
| Nb                  | 20121113 | UHV-Nb-600s   | 4.0e-3 mbar, 200 mA, 600 s  | X-ray       | 31.8 nm | 3.2  nm/min     |
| {{:data:20110713_nb.pdf|Nb}}| 20110713 | NG          | 4.0e-3 mbar, 220 mA, 8 min          | X-ray       | 46.0 nm     | xx.x nm | 5.75 nm/min    |
| Nb                  | 20120716 | UHV-Nb-340s   | 4.0e-3 mbar, xxx mA, 340 s  | X-ray       | 23.6 nm | 4.2  nm/min     |
| Nb                  | 20121113 | UHV-Nb-600s   | 4.0e-3 mbar, 200 mA, 600 s  | X-ray       | 31.8 nm | 3.2  nm/min     |
| Nb                  | 20120513 | Nb         | 4.0e-3 mbar, 200 mA, 600 s  | X-ray       | 30.67 nm | 3.067  nm/min     |
| Nb                  | 20120625 | Nb_10m20s  | 4.0e-3 mbar, 200 mA, 620 s  | X-ray       | 28.1 nm  | 2.72  nm/min     |

| Ni                  | 20120625 | Ni_5m      | 4.0e-3 mbar, 150 mA, 300 s  | X-ray       | 26.8 nm  | 5.36  nm/min     |
| Ni                  | 20140218 | Ni 11min   | 4.0e-3 mbar, 100 mA, 11 min | X-ray       | 37.6 nm  | 3.418 nm/min     |

| PdNi     | 20040915  | PN1        | 4e-3mbar, 200mA, 532V, 5min  | X-ray         | 69.4nm | 13.88 nm/min |
| PdNi     | 20050125  | P8         | 4e-3mbar, 200mA, 518V, 90sec  | X-ray         | 20.0nm | 2.14 A/s |
| PdNi                 | 20070302 | PdNiCal     | 4.0e-3 mbar, 200 mA, 2.5 min        | X-ray       | 28.8 nm     | 35.2 nm | 11.5 nm/min   |
| PdNi                 | 20100721 | PdNionSi    | 4.0e-3 mbar, 100 mA, 10 min         | X-ray       | 50.8 nm     | 60.0 nm | 5.1 nm/min    |
| PdNi                | 20111215 | PdNiUHVcal  | 4.0e-3 mbar, 160 mA, 4 min  | X-ray       | 63.9 nm | 16.0 nm/min     |
| PdNi                | 20120716 | UHV-PdNi-150s | 4.0e-3 mbar, xxx mA, 150 s  | X-ray       | 43.8 nm | 17.5 nm/min     |
| PdNi                | 20120716 | UHV-PdNi-150s | 4.0e-3 mbar, xxx mA, 150 s  | X-ray       | 43.8 nm | 17.5 nm/min     |

| Pt                  | 20111215 | PtUHVcal    | 4.0e-3 mbar, 120 mA, 4 min  | X-ray       | 27.3 nm | 6.83 nm/min     |
| Pt                  | 20120513 | Pt         | 4.0e-3 mbar, 120 mA, 300 s  | X-ray       | 46.22 nm | 9.244  nm/min     |

| Py       | 20040226  | Christianne| 4e-3mbar, 165mA              | X-ray         | -      | 1 nm/5.9sec  |
| Py       | 20040809  | Christianne| 4e-3mbar, 165mA              | X-ray         | -      | 2.54A/nm     |
| Py       | 20050317  | Youri      | 6e-3mbar, 200mA, 4min48s              | X-ray         | 57.8nm | 2.72A/nm     |
| Py       | 20050628  | Machiel    | 2.5e-3mbar, 165mA, 485V, 179deg, 10min  | X-ray         | 122nm (337A Xthal)| 2.03 A/s (0.56 A/s)|
| Py                   | 20060913 | 13_9_6_2    | 4.0e-3 mbar, 200 mA, 10 min, tilted | X-ray       | 163 nm      | 42.2 nm | 16.3 nm/min   |
| Py                   | 20060918 | 18_9_6_5    | 4.0e-3 mbar, 100 mA, 10 min, tilted | α-stepper   | 80-84 nm    | 19.0 nm | 8.2 nm/min    |
| Py                   | 20060918 | 18_9_6_3    | 2.5e-3 mbar, 165 mA, 10 min, tilted | α-stepper   | 142-147 nm  | 36.6 nm | 14.5 nm/min   |
| Py                   | 20070924 | Cal_07_Py   | 2.5e-3 mbar, 165 mA, 3.3 min        | X-ray       | 45.5 nm     | 10.7 nm | 13.7 nm/min   |
| Py                   | 20090401 | Py2.5e-3mbar| 2.5e-3 mbar, 165 mA, 3 min          | X-ray       | 30.9 nm     | -       | 10.3 nm/min   |
| Py                   | 20090401 | Py4.0e-3mbar| 4.0e-3 mbar, 165 mA, 3 min          | X-ray       | 27.9 nm     | -       | 9.3 nm/min    |