NanoWiki

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====== Welcome to the NanoLab! ======


===== New to the LION NanoLab =====

==== NanoLab ====
The NanoLab hosts shared facilities that are part of [[http://www.physics.leidenuniv.nl|Leiden Institute of Physics]].
The NanoLab equipment for thin film deposition, lithography, etching, inspection and other processing equipment can be found on the [[Facilities]] page.
If you want to use the equipment, you can find contact information on the webpage of the equipment.

==== NanoWiki ====

The Nano[[Wiki]] is a system of webpages that can be read, improved and extended by everyone who has access to them and functions as the group's common knowledge base.
Access is limited to selected local users only.

===== Equipment Manuals =====

==== Lithography Processes ====
   * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]]
   * [[Resist and e-beam recipes|Resist recipes]]
   * [[EBPG Raith-100|EBPG Raith-100]]
   * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]]

==== Plasma Etching ====
   * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]]
   * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]]
   * [[Ion beam etcher#manual|Ion beam etcher]]

==== Annealing ====
   * [[Thermcraft Tube Oven#manual|Tube Oven - H2, Ar and Vacuum Annealing]]
   * [[Lindberg/Blue tube oven#manual|Tube Oven - O2 and Ar Annealing]]

==== Vapor Deposition ====
   * [[Resistance evaporator manual|Resistance evaporator]]
   * [[E-beam evaporator#manual|E-beam evaporator]] (:!: updated instructions)
   * [[K-Cell evaporator#manual|K-cell evaporator]]

==== Sputter Depostion ====
   * [[ATC-1800#manual|ATC 1800F magnetron sputtering system]]
   * [[UHV system#manual|UHV magnetron sputtering system]]
   * [[Z-400#manual|Z-406 diode sputtering system]]
   * [[Z-407#manual|Z-407 automatic diode sputtering system]]
   * [[Oxides system#manual|Oxide epitaxy sputtering system]]
   * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]]

==== Inspection ====
   * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]]
   * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]]
   * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]]

==== Other utilities ====
   * [[Wire bonder|Wire bonder]] (:!: updated instructions)
   * [[Dishwasher cleanroom|Dishwasher cleanroom]]




===== Sample fabrication (recipes, rates) =====
   * [[Deposition processes and rates]]
   * [[Resist and e-beam recipes]]
   * [[Optical lithography recipes]]
   * [[Ion etching recipes and rates]]
   * [[Wet etching recipes and rates]]

===== Safety =====
   * [[Safety and lab regulations]]
   * [[Working with chemicals]]

===== Papers and talks =====
(this section is completely out of date)
   * [[MSM Papers]]
   * [[papers:papers|Recent papers]]
   * [[Group meeting talks]]
   * [[Student reports]]
   * [[Relevant literature]]
   * [[Books]]
   * [[Conference talks]]

===== Other =====
   * [[Latex links and examples]]
   * [[Software and Computers]]
   * [[Cables and connectors]]

----

Contact [[Marcel Hesselberth]] if you have questions about this documentation system or want to add new pages. Edit a page only if you are sure you will //improve// it (read [[wiki|how]]).