wet_etching_recipes_and_rates
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| wet_etching_recipes_and_rates [2004/12/12 15:48] – (old revision restored) 127.0.0.1 | wet_etching_recipes_and_rates [2006/11/10 16:36] (current) – alex | ||
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| + | ====== Materials ====== | ||
| + | ^Material | ||
| + | | Al | Alkalies, i.e. AZ312MIF: | ||
| + | | MoGe | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | >~50 nm/ | ||
| + | | YBCO | 5% h3PO4 + 95% H2O | RT | ? nm/ | ||
| + | | GdNi | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | ? nm/ | ||