optical_lithography
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| optical_lithography [2009/06/23 14:21] – hessel | optical_lithography [2019/10/08 09:41] (current) – [Spin coater] scholma | ||
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| - | ====== Spin coater ====== | ||
| - | The spin coater has 2 standard recipes. To change recipe, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows. | ||
| - | ^ 1 | 2 | | ||
| - | ^ 3 | 4 | | ||
| - | ^ 5 | 6 | | ||
| - | ^ 7 | 8 | | ||
| - | ^ 9 |10| | ||
| - | |||
| - | To change the recipe press the buttons in the following way: | ||
| - | |||
| - | - 1 edit. | ||
| - | - 10 change recipe. | ||
| - | - 7 (-) or 8 (+) to adjust. | ||
| - | - 2 end edit. | ||
| - | - use recipe 1 or 2 for optical resist. | ||
| Line 96: | Line 81: | ||
| The mask aligner uses 2.5" masks. We order 5" masks in Twente so that's 4 2.5" masks. You can design masks with the program clewin. | The mask aligner uses 2.5" masks. We order 5" masks in Twente so that's 4 2.5" masks. You can design masks with the program clewin. | ||
| Click on the link to get it: {{: | Click on the link to get it: {{: | ||
| + | |||
| + | ====== Technical stuff ======= | ||
| + | Lamp type: 030W7 HBO 200W mercury vapor lamp | ||
optical_lithography.1245766860.txt.gz · Last modified: 2009/06/23 14:21 by hessel