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optical_lithography [2008/08/04 12:25] knaapoptical_lithography [2019/10/08 09:41] (current) – [Spin coater] scholma
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-====== Spin coater ====== 
-The spin coater has 2 standard recipes. To change recipe, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows. 
  
-^ 1 | 2 | 
-^ 3 | 4 | 
-^ 5 | 6 | 
-^ 7 | 8 | 
-^ 9 |10| 
- 
-To change the recipe press the buttons in the following way: 
- 
-  - 1 edit.  
-  - 10 change recipe. 
-  - 7 (-) or 8 (+) to adjust. 
-  - 2 end edit. 
-  - use recipe 1 or 2 for optical resist. 
  
  
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 Removing resist after etching and lift-off can be done in acetone. Removing resist after etching and lift-off can be done in acetone.
 +
 +====== Mask fabrication  ======
 +
 +The mask aligner uses 2.5" masks. We order 5" masks in Twente so that's 4 2.5" masks. You can design masks with the program clewin.
 +Click on the link to get it: {{:clenwin.zip|}}
 +
 +====== Technical stuff =======
 +Lamp type: 030W7 HBO 200W mercury vapor lamp
optical_lithography.1217852714.txt.gz · Last modified: 2008/08/04 12:25 by knaap

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