| Both sides previous revisionPrevious revision | |
| old_rates_atc [2013/06/03 12:28] – boltje | old_rates_atc [2013/09/12 09:17] (current) – boltje |
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| | Cr [1] | 20111001 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 20.1 nm | 2.01 nm/min | | | Cr [1] | 20111001 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 20.1 nm | 2.01 nm/min | |
| | Cr [1]* | 20111013 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 18.8 nm | 1.88 nm/min | | | Cr [1]* | 20111013 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 18.8 nm | 1.88 nm/min | |
| | | Cr | 20130118 | Cr_cal | 2 mTorr, 100 mA, 15 min | X-ray | 22.4 nm | 1.493 nm/min | |
| | Cu | 20111104 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 41.4 nm | 4.14 nm/min | | | Cu | 20111104 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 41.4 nm | 4.14 nm/min | |
| | Cu | 20120320 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 39.9 nm | 3.99 nm/min | | | Cu | 20120320 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 39.9 nm | 3.99 nm/min | |
| | Co | 20120801 | Co-cal-190mA | 5 mTorr, 190 mA, 15 min | X-ray | 22.5 nm | 1.50 nm/min | | | Co | 20120801 | Co-cal-190mA | 5 mTorr, 190 mA, 15 min | X-ray | 22.5 nm | 1.50 nm/min | |
| | Co | 20121018 | Co_cal | 5 mTorr, 100 mA, 15 min | X-ray | 12.0 nm | 0.8 nm/min | | | Co | 20121018 | Co_cal | 5 mTorr, 100 mA, 15 min | X-ray | 12.0 nm | 0.8 nm/min | |
| | | Co | 20130118 | Co_cal | 5 mTorr, 150 mA, 20 min | X-ray | 26.2 nm | 1.747 nm/min | |
| | Fe | 20070405 | 040507b | 10 mTorr, 100 mA, 30 min | X-ray | 45.2 nm | 1.51 nm/min | | | Fe | 20070405 | 040507b | 10 mTorr, 100 mA, 30 min | X-ray | 45.2 nm | 1.51 nm/min | |
| | Ge | 20090401 | Ge 10 min | 10 mTorr, 100 mA, 10 min | X-ray | 26 nm | 2.64 nm/min | | | Ge | 20090401 | Ge 10 min | 10 mTorr, 100 mA, 10 min | X-ray | 26 nm | 2.64 nm/min | |
| | Nb | 20121018 | Nb_cal | 5 mTorr, 50 mA, 15 min | X-ray | 31.0 nm | 2.07 nm/min | | | Nb | 20121018 | Nb_cal | 5 mTorr, 50 mA, 15 min | X-ray | 31.0 nm | 2.07 nm/min | |
| | Pt | 20121018 | Pt_cal | 5 mTorr, 50 mA, 15 min | X-ray | 8.6 nm | 0.57 nm/min | | | Pt | 20121018 | Pt_cal | 5 mTorr, 50 mA, 15 min | X-ray | 8.6 nm | 0.57 nm/min | |
| | | Py | 20130603 | Py_cal | 5 mTorr, 150 mA, 30 min | X-ray | 58.8 nm | 1.96 nm/min | |
| | | Py | 20130605 | Py_cal | 2 mTorr, 250 mA, 6 min + 8 sec | X-ray | 27.9 nm | 4.549 nm/min | |
| | | Sm | 20130118 | Sm_cal | 5 mTorr, 50 mA, 15 min | X-ray | 14.8 nm | 0.987 nm/min | |
| | Sm | 20120319 | Sm_cal | 5 mTorr, 100 mA, 10 min | X-ray | 49.9 nm | 4.99 nm/min | | | Sm | 20120319 | Sm_cal | 5 mTorr, 100 mA, 10 min | X-ray | 49.9 nm | 4.99 nm/min | |
| | Sm | 20120413 | Sm_cal_50mA | 5 mTorr, 50 mA, 10 min | X-ray | 26.6 nm | 2.66 nm/min | | | Sm | 20120413 | Sm_cal_50mA | 5 mTorr, 50 mA, 10 min | X-ray | 26.6 nm | 2.66 nm/min | |
| [2] New target oktober 2011 | [2] New target oktober 2011 |
| [3] add steel spacers in magnet configuration | [3] add steel spacers in magnet configuration |
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