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| old_rates_atc [2012/03/20 10:41] – tim | old_rates_atc [2013/09/12 09:17] (current) – boltje |
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| ^ Material ^ Date ^ Sample ID ^ Process parameters ^ Measured with ^ Result ^ Rate ^ | ^ Material ^ Date ^ Sample ID ^ Process parameters ^ Measured with ^ Result ^ Rate ^ |
| | | AgMn | 20070305 | AgMn 74 min | 10 mTorr, 50 mA, 74 min | X-ray | 51.0 nm | 0.688 nm/min | |
| | Au | 20051104 | Amy Au | 10 mTorr, 100 mA, 10 min | X-ray | 91.9 nm | 9.2 nm/min | | | Au | 20051104 | Amy Au | 10 mTorr, 100 mA, 10 min | X-ray | 91.9 nm | 9.2 nm/min | |
| | Au | 20070405 | 040507f | 10 mTorr, 100 mA, 4 min | X-ray | 31.9 nm | 7.98 nm/min | | | Au | 20070405 | 040507f | 10 mTorr, 100 mA, 4 min | X-ray | 31.9 nm | 7.98 nm/min | |
| | Au | 20080918 | Jorina Au | 10 mTorr, 100 mA, 3 min | X-ray | 25.5 nm | 8.5 nm/min | | | Au | 20080918 | Jorina Au | 10 mTorr, 100 mA, 3 min | X-ray | 25.5 nm | 8.5 nm/min | |
| | Au | 20090401 | Au 5 min | 10 mTorr, 100 mA, 5 min | X-ray | 45.3 nm | 9.06 nm/min | | | Au | 20090401 | Au 5 min | 10 mTorr, 100 mA, 5 min | X-ray | 45.3 nm | 9.06 nm/min | |
| | | Au | 20100723 | AuonSi | 10 mTorr, 70 mA, 5 min | X-ray | 28.6 nm | 5.7 nm/min | |
| | | AuFe6% | 20051104 | Amy AuFe | 10 mTorr, 100 mA, 10 min | X-ray | 60.6 nm | 6.1 nm/min | |
| | | AuFe6% | 20080310 | Jorina AuFe | 10 mTorr, 100 mA, 5 min | X-ray | 35.3 nm | 7.06 nm/min | |
| | | AuFe6% | 20080911 | Jorina AuFe | 10 mTorr, 100 mA, 5 min | X-ray | 36.4 nm | 7.28 nm/min | |
| | | Cr | 20120320 | Cr_cal | 2 mTorr, 100 mA, 10 min | X-ray | 16.9 nm | 1.69 nm/min | |
| | | Cr | 20120417 | Cr_cal | 2 mTorr, 100 mA, 10 min | X-ray | 16.9 nm | 1.69 nm/min | |
| | Cr | 20100929 | CronSi | 5 mTorr, 100 mA, 15 min | X-ray | 20.1 nm | 1.34 nm/min | | | Cr | 20100929 | CronSi | 5 mTorr, 100 mA, 15 min | X-ray | 20.1 nm | 1.34 nm/min | |
| | Cr* | 20110713 | Cr_cal | 2 mTorr, 100 mA, 10 min | X-ray | 19.0 nm | 1.90 nm/min | | | Cr* | 20110713 | Cr_cal | 2 mTorr, 100 mA, 10 min | X-ray | 19.0 nm | 1.90 nm/min | |
| | Cr | 20110110 | Cr-03403 | 2 mTorr, 150mA, 250°C, 10m30s | X-ray | 29.5 nm | 2.81 nm/min | | | Cr | 20110110 | Cr-03403 | 2 mTorr, 150mA, 250°C, 10m30s | X-ray | 29.5 nm | 2.81 nm/min | |
| | Cr | 20110111 | Cr-03501 | 2 mTorr, 200mA, 250°C, 10 min | X-ray | 39.6 nm | 3.96 nm/min | | | Cr | 20110111 | Cr-03501 | 2 mTorr, 200mA, 250°C, 10 min | X-ray | 39.6 nm | 3.96 nm/min | |
| | | Cr [1] | 20111001 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 20.1 nm | 2.01 nm/min | |
| | | Cr [1]* | 20111013 | Cr-cal | 2 mTorr, 100 mA, 10 min | X-ray | 18.8 nm | 1.88 nm/min | |
| | | Cr | 20130118 | Cr_cal | 2 mTorr, 100 mA, 15 min | X-ray | 22.4 nm | 1.493 nm/min | |
| | | Cu | 20111104 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 41.4 nm | 4.14 nm/min | |
| | | Cu | 20120320 | Cu-cal | 5 mTorr, 100 mA, 10 min | X-ray | 39.9 nm | 3.99 nm/min | |
| | | Cu | 20120417 | Cu-cal | 5 mTorr, 50 mA, 10 min | X-ray | 17.9 nm | 1.79 nm/min | |
| | | Cu | 20120523 | Cu-cal-atc | 5 mTorr, 50 mA, 15 min | X-ray | 27.3 nm | 1.82 nm/min | |
| | | Cu | 20130118 | Cu_cal | 5 mTorr, 50 mA, 15 min | X-ray | 22.7 nm | 1.135 nm/min | |
| | | Co | 20120320 | Co-cal-50mA | 5 mTorr, 50 mA, 10 min | X-ray | 9.3 nm | 0.93 nm/min | |
| | | Co | 20120320 | Co-cal-100mA | 5 mTorr, 100 mA, 10 min | X-ray | 20.4 nm | 2.04 nm/min | |
| | | Co | 20120320 | Co-cal | 5 mTorr, 100 mA, 10 min | X-ray | 22.0 nm | 2.20 nm/min | |
| | | Co | 20120320 | Co-cal-150mA | 5 mTorr, 150 mA, 10 min | X-ray | 19.1 nm | 1.91 nm/min | |
| | | Co | 20120412 | Co-cal-75mA | 5 mTorr, 75 mA, 10 min | X-ray | 6.9 nm | 0.69 nm/min | |
| | | Co | 20120413 | Co-cal-150mA | 5 mTorr, 150 mA, 10 min | X-ray | 14.5 nm | 1.45 nm/min | |
| | | Co | 20120801 | Co-cal-115mA | 5 mTorr, 115 mA, 15 min | X-ray | 13.4 nm | 0.89 nm/min | |
| | | Co | 20120801 | Co-cal-190mA | 5 mTorr, 190 mA, 15 min | X-ray | 22.5 nm | 1.50 nm/min | |
| | | Co | 20121018 | Co_cal | 5 mTorr, 100 mA, 15 min | X-ray | 12.0 nm | 0.8 nm/min | |
| | | Co | 20130118 | Co_cal | 5 mTorr, 150 mA, 20 min | X-ray | 26.2 nm | 1.747 nm/min | |
| | | Fe | 20070405 | 040507b | 10 mTorr, 100 mA, 30 min | X-ray | 45.2 nm | 1.51 nm/min | |
| | | Ge | 20090401 | Ge 10 min | 10 mTorr, 100 mA, 10 min | X-ray | 26 nm | 2.64 nm/min | |
| | | Ge | 20080626 | Ge 10 min | 10 mTorr, 100 mA, 10 min | X-ray | 21-27 nm | 2.1-2.7 nm/min | |
| | | MoGe | 20072302 | MoGe 5min | 10 mTorr, 100 mA, 5 min | X-ray | 6.66 nm | 1.32 nm/min | |
| | | MoGe | 20080911 | Jorina MoGe | 10 mTorr, 100 mA, 10 min | X-ray | 13.6 nm | 1.36 nm/min | |
| | | Nb | 20121018 | Nb_cal | 5 mTorr, 50 mA, 15 min | X-ray | 31.0 nm | 2.07 nm/min | |
| | | Pt | 20121018 | Pt_cal | 5 mTorr, 50 mA, 15 min | X-ray | 8.6 nm | 0.57 nm/min | |
| | | Py | 20130603 | Py_cal | 5 mTorr, 150 mA, 30 min | X-ray | 58.8 nm | 1.96 nm/min | |
| | | Py | 20130605 | Py_cal | 2 mTorr, 250 mA, 6 min + 8 sec | X-ray | 27.9 nm | 4.549 nm/min | |
| | | Sm | 20130118 | Sm_cal | 5 mTorr, 50 mA, 15 min | X-ray | 14.8 nm | 0.987 nm/min | |
| | | Sm | 20120319 | Sm_cal | 5 mTorr, 100 mA, 10 min | X-ray | 49.9 nm | 4.99 nm/min | |
| | | Sm | 20120413 | Sm_cal_50mA | 5 mTorr, 50 mA, 10 min | X-ray | 26.6 nm | 2.66 nm/min | |
| | | Sm | 20120413 | Sm_cal_100mA | 5 mTorr, 100 mA, 10 min 5 sec | X-ray | 53.9 nm | 5.39 nm/min | |
| | | Sm [3] | 20120419 | Sm_50mA_06mm | 5 mTorr, 50 mA, 10 min angle 06mm | X-ray | 27.0 nm | 2.70 nm/min | |
| | | Sm [3] | 20120419 | Sm_50mA_15mm | 5 mTorr, 50 mA, 10 min angle 15mm | X-ray | 13.4 nm | 1.34 nm/min | |
| | | Sm [3] | 20120419 | Sm_50mA_20mm | 5 mTorr, 50 mA, 21 min angle 20mm | X-ray | 9 nm | 0.43 nm/min | |
| | | Sm [3] | 2012.... | Sm_30mA_15mm | 5 mTorr, 30 mA, 15 min angle 15mm | X-ray | . nm | .... nm/min | |
| | | Sm [3] | 20120802 | Sm_50mA_20mm | 5 mTorr, 50 mA, 15.30 min angle 15mm | X-ray | 16.1 nm | 1.04 nm/min | |
| | | Sm | 20121018 | Sm_cal | 5 mTorr, 50 mA, 15 min | X-ray | .... nm | ..... nm/min | |
| | SmCo<sub>5</sub> | 20100929 | SmCo<sub>5</sub>onSi | 5 mTorr, 100mA, 15 min | X-ray | 31.8 nm | 2.12 nm/min | | | SmCo<sub>5</sub> | 20100929 | SmCo<sub>5</sub>onSi | 5 mTorr, 100mA, 15 min | X-ray | 31.8 nm | 2.12 nm/min | |
| | SmCo<sub>5</sub> | 20110324 | Sm_019_cal | 16 mTorr, 150mA, 10 min | X-ray | 8.80 nm | 0.88 nm/min | | | SmCo<sub>5</sub> | 20110324 | Sm_019_cal | 16 mTorr, 150mA, 10 min | X-ray | 8.80 nm | 0.88 nm/min | |
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| * New target june 2011 | * New target june 2011 |
| | [1] New target june 2011 |
| | [2] New target oktober 2011 |
| | [3] add steel spacers in magnet configuration |
