nanolab
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| nanolab [2025/04/17 13:14] – wigbout | nanolab [2025/11/28 14:30] (current) – [Welcome to the NanoLab!] wigbout | ||
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| ====== Welcome to the NanoLab! ====== | ====== Welcome to the NanoLab! ====== | ||
| - | {{http:// | ||
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| Access is limited to selected local users only. | Access is limited to selected local users only. | ||
| - | ===== Links ===== | + | ===== Equipment Manuals |
| - | ==== Equipment Manuals ==== | + | ==== Lithography Processes |
| - | + | ||
| - | === Lithography Processes === | + | |
| * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | ||
| * [[Resist and e-beam recipes|Resist recipes]] | * [[Resist and e-beam recipes|Resist recipes]] | ||
| Line 25: | Line 22: | ||
| * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | ||
| - | === Plasma Etching === | + | ==== Plasma Etching |
| * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | ||
| * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | ||
| * [[Ion beam etcher# | * [[Ion beam etcher# | ||
| - | === Annealing === | + | ==== Annealing |
| * [[Thermcraft Tube Oven# | * [[Thermcraft Tube Oven# | ||
| * [[Lindberg/ | * [[Lindberg/ | ||
| - | === Vapor Deposition === | + | ==== Vapor Deposition |
| * [[Resistance evaporator manual|Resistance evaporator]] | * [[Resistance evaporator manual|Resistance evaporator]] | ||
| * [[E-beam evaporator# | * [[E-beam evaporator# | ||
| * [[K-Cell evaporator# | * [[K-Cell evaporator# | ||
| - | === Sputter Depostion === | + | ==== Sputter Depostion |
| * [[ATC-1800# | * [[ATC-1800# | ||
| * [[UHV system# | * [[UHV system# | ||
| Line 47: | Line 44: | ||
| * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | ||
| - | === Inspection === | + | ==== Inspection |
| * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | ||
| * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | ||
| Line 53: | Line 50: | ||
| ==== Other utilities ==== | ==== Other utilities ==== | ||
| - | * [[Wire bonder#manual|Wire bonder]] (:!: updated instructions) | + | * [[Wire bonder|Wire bonder]] (:!: updated instructions) |
| * [[Dishwasher cleanroom|Dishwasher cleanroom]] | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | ||
| Line 59: | Line 56: | ||
| - | ==== Sample fabrication (recipes, rates) ==== | + | ===== Sample fabrication (recipes, rates) |
| * [[Deposition processes and rates]] | * [[Deposition processes and rates]] | ||
| * [[Resist and e-beam recipes]] | * [[Resist and e-beam recipes]] | ||
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| * [[Wet etching recipes and rates]] | * [[Wet etching recipes and rates]] | ||
| - | ==== Safety ==== | + | ===== Safety |
| * [[Safety and lab regulations]] | * [[Safety and lab regulations]] | ||
| * [[Working with chemicals]] | * [[Working with chemicals]] | ||
| - | ==== Papers and talks ==== | + | ===== Papers and talks ===== |
| (this section is completely out of date) | (this section is completely out of date) | ||
| * [[MSM Papers]] | * [[MSM Papers]] | ||
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| * [[Conference talks]] | * [[Conference talks]] | ||
| - | ==== Other ==== | + | ===== Other ===== |
| * [[Latex links and examples]] | * [[Latex links and examples]] | ||
| * [[Software and Computers]] | * [[Software and Computers]] | ||
nanolab.1744895645.txt.gz · Last modified: 2025/04/17 13:14 by wigbout