nanolab
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| nanolab [2024/12/18 12:04] – [Sample fabrication] wigbout | nanolab [2025/11/28 14:30] (current) – [Welcome to the NanoLab!] wigbout | ||
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| ====== Welcome to the NanoLab! ====== | ====== Welcome to the NanoLab! ====== | ||
| - | {{http:// | ||
| - | ===== What is the NanoLab ===== | ||
| - | The NanoLab hosts shared facilities that are part of [[http:// | ||
| - | The NanoLab equipment for thin film deposition, lithography, | ||
| - | The NanoWiki is the digital resource for information about these shared facilities. | ||
| - | The Nano[[Wiki]] is a system of web pages that can be read, improved and extended by everyone who has access to them and functions as the group' | + | ===== New to the LION NanoLab ===== |
| + | |||
| + | ==== NanoLab ==== | ||
| + | The NanoLab hosts shared facilities that are part of [[http:// | ||
| + | The NanoLab equipment for thin film deposition, lithography, | ||
| + | If you want to use the equipment, you can find contact information on the webpage of the equipment. | ||
| + | |||
| + | ==== NanoWiki ==== | ||
| + | |||
| + | The Nano[[Wiki]] is a system of webpages | ||
| Access is limited to selected local users only. | Access is limited to selected local users only. | ||
| + | ===== Equipment Manuals ===== | ||
| + | ==== Lithography Processes ==== | ||
| + | * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | ||
| + | * [[Resist and e-beam recipes|Resist recipes]] | ||
| + | * [[EBPG Raith-100|EBPG Raith-100]] | ||
| + | * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | ||
| + | ==== Plasma Etching ==== | ||
| + | * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | ||
| + | * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | ||
| + | * [[Ion beam etcher# | ||
| - | ==== Sample fabrication | + | ==== Annealing |
| - | * [[Equipment manuals]] | + | * [[Thermcraft Tube Oven# |
| + | * [[Lindberg/ | ||
| + | |||
| + | ==== Vapor Deposition ==== | ||
| + | * [[Resistance evaporator manual|Resistance evaporator]] | ||
| + | * [[E-beam evaporator# | ||
| + | * [[K-Cell evaporator# | ||
| + | |||
| + | ==== Sputter Depostion ==== | ||
| + | * [[ATC-1800# | ||
| + | * [[UHV system# | ||
| + | * [[Z-400# | ||
| + | * [[Z-407# | ||
| + | * [[Oxides system# | ||
| + | * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | ||
| + | |||
| + | ==== Inspection ==== | ||
| + | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | ||
| + | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | ||
| + | * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]] | ||
| + | |||
| + | ==== Other utilities ==== | ||
| + | * [[Wire bonder|Wire bonder]] (:!: updated instructions) | ||
| + | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | ||
| + | |||
| + | |||
| + | |||
| + | |||
| + | ===== Sample fabrication (recipes, rates) ===== | ||
| * [[Deposition processes and rates]] | * [[Deposition processes and rates]] | ||
| * [[Resist and e-beam recipes]] | * [[Resist and e-beam recipes]] | ||
| Line 21: | Line 63: | ||
| * [[Wet etching recipes and rates]] | * [[Wet etching recipes and rates]] | ||
| - | ==== Papers and talks ==== | + | ===== Safety ===== |
| + | * [[Safety and lab regulations]] | ||
| + | * [[Working with chemicals]] | ||
| + | |||
| + | ===== Papers and talks ===== | ||
| (this section is completely out of date) | (this section is completely out of date) | ||
| * [[MSM Papers]] | * [[MSM Papers]] | ||
| Line 31: | Line 77: | ||
| * [[Conference talks]] | * [[Conference talks]] | ||
| - | ==== Safety | + | ===== Other ===== |
| - | * [[Safety and lab regulations]] | + | |
| - | * [[Working with chemicals]] | + | |
| - | + | ||
| - | + | ||
| - | + | ||
| - | ==== Other ==== | + | |
| * [[Latex links and examples]] | * [[Latex links and examples]] | ||
| * [[Software and Computers]] | * [[Software and Computers]] | ||
| * [[Cables and connectors]] | * [[Cables and connectors]] | ||
| - | |||
| ---- | ---- | ||
| Contact [[Marcel Hesselberth]] if you have questions about this documentation system or want to add new pages. Edit a page only if you are sure you will //improve// it (read [[wiki|how]]). | Contact [[Marcel Hesselberth]] if you have questions about this documentation system or want to add new pages. Edit a page only if you are sure you will //improve// it (read [[wiki|how]]). | ||
nanolab.1734523464.txt.gz · Last modified: 2024/12/18 12:04 by wigbout