Differences

This shows you the differences between two versions of the page.

--- med010 [2011/06/23 14:22] – wolfgang
+++ med010 [2012/09/20 14:43] (current) – wolfgang
@@ Line 5: / Line 5: @@
 ====== Manual ======
+===== Start up & Loading sample =====
+  * Open N2 line at the wall 1/2 turn (check pressure reducer)
+  * Open Ar bottle and the in-line valve in the yellow cabinet
+  * Check if the required target material is in
+  * If system is vented, insert your sample and close the top
+  * Switch on system mains (green switch)
+  * Switch on chiller (below the table)
 ===== Sputtering =====
-  * open N2 valve at wall 1/2 turn
+  * Purge the argon line by opening the needle valve and repeatedly opening and closing the argon valve at the bottle
-  * insert sample, close chamber, open target knob on top of chamber
+  * Carefully close the needle valve to pump down
-  * switch on (green switch), this starts prepump
+  * Switch turbo on at 1e-1 mbar by pressing "pumping unit" and "stand by" on the turbo controller
-  * open Ar bottle and little valve
+  * Adjust pressure using needle valve to 5E-2mbar
-  * purge 2-3x with argon (e.g., at 1E-1mbar open&close needle valve)
+  * Set current dial knob to 0 and switch to "HTS"
-  * if sputtering longer than 1min, switch chiller on (~18deg)
+  * Select sputtering time and press start
-  * switch turbo on at 1E-1mbar: activate "pumping unit" and "stand by"
+  * Adjust current dial for desired current (lower-righ indicator!)
-  * adjust pressure using needle valve to 5E-2mbar
+  * Wait
-  * switch big dial knob to 0, set to "HTS"
+  * Switch turbo pump off
-  * select sputtering time and press start
+  * If turbo stands still, switch off machine (green button), automatic N2 purging starts
-  * adjust big dial for desired current (lower-righ indicator!)
+  * Close Ar, N2 supply ; switch off chiller
-  * wait
-  * switch turbo pump off
-  * if turbo stands still, switch off machine (green button), automatic N2 purging starts
-  * close Ar, N2 supply ; switch off chiller
@@ Line 36: / Line 40: @@
 | Ag (?)               | 20110623 | SEM of SU-8    | 5E-2 mbar, 15 mA, 15s | SEM pic     | nice      |         |
+====== bugs ======
+===== yellow HV light does not go on =====
+Don't do this because of high voltage in the machine!
+{{:balzer-med010-relay.jpg?700|}}