Differences

This shows you the differences between two versions of the page.

--- med010 [2011/06/23 12:10] – created wolfgang
+++ med010 [2012/09/20 14:43] (current) – wolfgang
@@ Line 5: / Line 5: @@
 ====== Manual ======
+===== Start up & Loading sample =====
+  * Open N2 line at the wall 1/2 turn (check pressure reducer)
+  * Open Ar bottle and the in-line valve in the yellow cabinet
+  * Check if the required target material is in
+  * If system is vented, insert your sample and close the top
+  * Switch on system mains (green switch)
+  * Switch on chiller (below the table)
+===== Sputtering =====
+  * Purge the argon line by opening the needle valve and repeatedly opening and closing the argon valve at the bottle
+  * Carefully close the needle valve to pump down
+  * Switch turbo on at 1e-1 mbar by pressing "pumping unit" and "stand by" on the turbo controller
+  * Adjust pressure using needle valve to 5E-2mbar
+  * Set current dial knob to 0 and switch to "HTS"
+  * Select sputtering time and press start
+  * Adjust current dial for desired current (lower-righ indicator!)
+  * Wait
+  * Switch turbo pump off
+  * If turbo stands still, switch off machine (green button), automatic N2 purging starts
+  * Close Ar, N2 supply ; switch off chiller
-===== Sputtering =====
 ===== change target =====
+  * open sputter head, fix head,
+  * remove the two rings (with gloves, no force!)
+  * replace target (manual: 54mm diameter)
+  * note target material on machine!
@@ Line 16: / Line 37: @@
-^ Material             ^  Date    ^ Sample ID   ^ Process parameters                  ^ Measurement ^ Result      ^ Xtal    ^ Rate          ^
+^ Material             ^  Date    ^ purpose        ^ Process parameters    ^ Measurement ^ Result      ^ Rate          ^
-| XXXX                   | 20060913 | 13_9_6_5    | 4.0e-3 mbar, 200 mA, 5 min, tilted  | X-ray       | 110 nm      | 46.8 nm | 22 nm/min     |
+| Ag (?)               | 20110623 | SEM of SU-8    | 5E-2 mbar, 15 mA, 15s | SEM pic     | nice      |         |
+====== bugs ======
+===== yellow HV light does not go on =====
+Don't do this because of high voltage in the machine!
+{{:balzer-med010-relay.jpg?700|}}