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equipment_manuals [2025/04/17 13:11] wigboutequipment_manuals [2025/07/29 10:16] (current) – [Manuals] wigbout
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 ====== Manuals ====== ====== Manuals ======
  
-==== General ==== +=== Lithography Processes ===
- +
-=== Lithography ===+
    * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]]    * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]]
    * [[Resist and e-beam recipes|Resist recipes]]    * [[Resist and e-beam recipes|Resist recipes]]
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    * [[Lindberg/Blue tube oven#manual|Tube Oven - O2 and Ar Annealing]]    * [[Lindberg/Blue tube oven#manual|Tube Oven - O2 and Ar Annealing]]
  
-===Deposition ==== +=== Vapor Deposition ===
- +
-=== Evaporation ===+
    * [[Resistance evaporator manual|Resistance evaporator]]    * [[Resistance evaporator manual|Resistance evaporator]]
    * [[E-beam evaporator#manual|E-beam evaporator]] (:!: updated instructions)    * [[E-beam evaporator#manual|E-beam evaporator]] (:!: updated instructions)
    * [[K-Cell evaporator#manual|K-cell evaporator]]    * [[K-Cell evaporator#manual|K-cell evaporator]]
  
-=== Sputtering ===+=== Sputter Depostion ===
    * [[ATC-1800#manual|ATC 1800F magnetron sputtering system]]    * [[ATC-1800#manual|ATC 1800F magnetron sputtering system]]
    * [[UHV system#manual|UHV magnetron sputtering system]]    * [[UHV system#manual|UHV magnetron sputtering system]]
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    * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]]    * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]]
  
-==== Inspection ====+=== Inspection ===
    * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]]    * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]]
    * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]]    * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]]
    * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]]    * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]]
 +
 +
 +
  
 ==== Other utilities ==== ==== Other utilities ====
-   * [[Wire bonder#manual|Wire bonder]]+   * [[Wire bonder#manual|Wire bonder]] (:!: updated instructions)
    * [[Dishwasher cleanroom|Dishwasher cleanroom]]    * [[Dishwasher cleanroom|Dishwasher cleanroom]]
  
 +\\ 
 +\\ 
 +\\ 
 +\\ 
 +\\ 
 +\\
 ====== Outdated Manuals ====== ====== Outdated Manuals ======
  
equipment_manuals.1744895501.txt.gz · Last modified: 2025/04/17 13:11 by wigbout

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