equipment_manuals
Differences
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| equipment_manuals [2025/04/17 13:08] – [Manuals] wigbout | equipment_manuals [2025/07/29 10:16] (current) – [Manuals] wigbout | ||
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| ====== Manuals ====== | ====== Manuals ====== | ||
| - | ==== Microscopes ==== | + | === Lithography Processes |
| - | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | + | |
| - | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | + | |
| - | + | ||
| - | ==== General ==== | + | |
| - | + | ||
| - | === Cleanroom | + | |
| * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | ||
| * [[Resist and e-beam recipes|Resist recipes]] | * [[Resist and e-beam recipes|Resist recipes]] | ||
| * [[EBPG Raith-100|EBPG Raith-100]] | * [[EBPG Raith-100|EBPG Raith-100]] | ||
| - | * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]] | ||
| - | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | ||
| * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | ||
| - | * [[Glovebox]] | + | |
| + | === Plasma Etching === | ||
| * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | ||
| * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | ||
| * [[Ion beam etcher# | * [[Ion beam etcher# | ||
| - | === Outside Cleanroom | + | === Annealing |
| - | * [[Wire bonder# | + | |
| * [[Thermcraft Tube Oven# | * [[Thermcraft Tube Oven# | ||
| * [[Lindberg/ | * [[Lindberg/ | ||
| - | ==== Deposition | + | === Vapor Deposition === |
| - | + | ||
| - | === Evaporation | + | |
| * [[Resistance evaporator manual|Resistance evaporator]] | * [[Resistance evaporator manual|Resistance evaporator]] | ||
| * [[E-beam evaporator# | * [[E-beam evaporator# | ||
| * [[K-Cell evaporator# | * [[K-Cell evaporator# | ||
| - | === Sputtering | + | === Sputter Depostion |
| * [[ATC-1800# | * [[ATC-1800# | ||
| * [[UHV system# | * [[UHV system# | ||
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| * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | ||
| + | === Inspection === | ||
| + | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | ||
| + | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | ||
| + | * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]] | ||
| + | |||
| + | |||
| + | |||
| + | |||
| + | ==== Other utilities ==== | ||
| + | * [[Wire bonder# | ||
| + | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | ||
| + | |||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| ====== Outdated Manuals ====== | ====== Outdated Manuals ====== | ||
equipment_manuals.1744895297.txt.gz · Last modified: 2025/04/17 13:08 by wigbout