ebpg_raith
Differences
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| ebpg_raith [2012/07/18 15:07] – voltan | ebpg_raith [2018/05/22 12:08] (current) – removed scholma | ||
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| - | ====== Recipe ====== | ||
| - | |||
| - | ==== ARN7700.008 ==== | ||
| - | * spin at 4000rpm | ||
| - | * bake at 85ºC for 1 min | ||
| - | * e-beam 20kV at least 24ųC/cm^2 | ||
| - | * prebake 100ºC for 2 min | ||
| - | * develop AR300-47 30s | ||
| - | * stop demiwater 30s | ||
| - | |||
| - | |||
| - | ==== ARP672.045 ==== | ||
| - | * spin at 4000rpm | ||
| - | * bake at 85ºC for 1 min | ||
| - | * e-beam 20kV at least 24ųC/cm^2 | ||
| - | * develop AR300-47 40s | ||
| - | * stop demiwater 30s | ||
ebpg_raith.1342624079.txt.gz · Last modified: 2012/07/18 15:07 by voltan