Differences

This shows you the differences between two versions of the page.

--- ebpg_graphic_manual [2025/11/06 21:20] – [EBPG Raith 100 Pictured Manual] fabian
+++ ebpg_graphic_manual [2025/11/06 23:50] (current) – [Defining the origin] fabian
@@ Line 30: / Line 30: @@
 ===== e_line =====
-e_line is the software you use to do all the patterning and moving around the stage. Double-click on the e-line logo on the desktop to start e_line.
+e_line is the software you use to do all the patterning and moving around the stage. Double-click on the e-line logo on the desktop to start e_line. When you walk into the clean room and before loading your sample (i.e. venting), the stage of the EBPG should be in exchange position. In this position, the crosshair is are marked yellow in the top left of the wafer map.
+Two very important buttons in e_line are the beam blanker control and the imaging/ patterning control. The **beam blanker control** switches the beam from hitting the sample to hitting the blanker, thereby effectively turning on and off the electron beam. Keep in mind, however, that regardless of blanker setting the filament of the electron source is not switched - it can only be controlled in VegaTC.
+The **imaging/ patterning control** switches detector control between VegaTC and e_line. If in IMG mode, VegaTC shows an image in the SEM scanning window. If PAT is selected, no image is shown in VegaTC.
 {{:images:cleanroom:software:eline_overview.png?800|}}
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 ===== Defining the origin =====
-Define the origin of the global coordinate system on your sample. Typically this is the lower left corner of your sample.
+Define the origin of the global coordinate system on your sample. Typically this is the lower left corner of your sample. To find the sample, CTRL + click on the schematic of the sample holder somewhere you know your sample won't be. Once the stage finished moving, turn on the electron beam by clicking on the blanker button in e_line. Should you accidentally see your sample already, immediately blank the electron beam again and move off your sample.
+Once you see an image in VegaTC, slowly move towards your sample's edge. Keep an eye on the scale bar at the bottom of the VegaTC image window and make sure not to accidentally overexpose too much of your sample once you find it. With your sample located, move to the bottom left corner of the sample. Go to a zoom level >1000x, turn on the cross hair in VegaTC and precisely locate the corner.
+----
+:!:This step is particularly important if you're planning to perform overlay patterning. The origin is the first point of reference for alignment.
+----
+In e_line, click on the XY-UV-tab (third tab from the top in the vertical tab bar). Select //Origin Correction//, then click //Adjust//. The corner is now the origin of your coordinate system. Distances are displayed with respect to this point.
+{{ :images:cleanroom:software:eline_coordinates.png?300 |}}