ebpg_graphic_manual
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| ===== Defining the origin ===== | ===== Defining the origin ===== | ||
| - | Define the origin of the global coordinate system on your sample. Typically this is the lower left corner of your sample. To find the sample, CTRL + click on the schematic of the sample holder somewhere you know your sample won't be. Once the stage finished moving, turn on the electron beam by clicking on the blanker button in e_line. | + | Define the origin of the global coordinate system on your sample. Typically this is the lower left corner of your sample. To find the sample, CTRL + click on the schematic of the sample holder somewhere you know your sample won't be. Once the stage finished moving, turn on the electron beam by clicking on the blanker button in e_line. |
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| + | Once you see an image in VegaTC, slowly move towards your sample' | ||
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| + | ---- | ||
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| + | :!:This step is particularly important if you're planning to perform overlay patterning. The origin is the first point of reference for alignment. | ||
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| + | ---- | ||
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| + | In e_line, click on the XY-UV-tab (third tab from the top in the vertical tab bar). Select //Origin Correction//, | ||
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ebpg_graphic_manual.txt · Last modified: 2025/11/06 23:50 by fabian