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atc-1800

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atc-1800 [2023/02/03 12:33] – scholmaatc-1800 [2025/02/18 15:15] (current) – [Flat Au films on Mica] wigbout
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 ====== ATC Sputtering System manual ======= ====== ATC Sputtering System manual =======
 +{{ ::atc_and_atc_orion_manual_-_march_2009_-_ce.pdf |Link to the manual}}
  
 ====== Description ====== ====== Description ======
Line 7: Line 8:
 ===== DONT's ===== ===== DONT's =====
   * **Never make a modification** to the system without consulting a technician   * **Never make a modification** to the system without consulting a technician
-  * **Never transfer a hot sample holder** (cold is, say, 150 °C)+  * **Never transfer a hot sample holder** (cold is, say, 50 °C)
   * **Never hot-switch the switchbox** (switch off power first!)   * **Never hot-switch the switchbox** (switch off power first!)
   * **Never exceed 50W RF power for substrate bias**   * **Never exceed 50W RF power for substrate bias**
Line 68: Line 69:
   - Open VAT-valve fully    - Open VAT-valve fully 
   - Switch off rotation   - Switch off rotation
-  - When the sample stage has cooled to <100°C, transfer your sample to loadlock+  - When the sample stage has cooled to <50°C, transfer your sample to loadlock
  
 ===== Removing the sample ===== ===== Removing the sample =====
Line 192: Line 193:
 loading into ATC. Use a Cu holder for the mica, no adhesives loading into ATC. Use a Cu holder for the mica, no adhesives
  
-Pressure +  * Pressure: 20 mTorr setpoint, low -7 background 
- +  * Ar Flow: 24 
-20 mTorr setpoint, low -7 background +  * Temperature: 300deg C for deposition.  
- +  * Current: 200 mA for 20 minutes, then 2 minutes 45 mA 
-Ar Flow +  * Voltage: Around 500 / 380 
- +  * O2 flow: 1 
-24 +  * Heating/cooling rate: Heating: Heat up before deposition to 450  to bake out the dirt from chamber, holder & substrate. Radiative cooldown to 300 for deposition. Anneal for 1-2hrs postdeposition at 300. Cooldown radiative by switching off heat. 
- +  * RMS roughness (and better roughness data if available): I think a picture says more than 1000 roughness values. Picture: stm image in air, with a lot of vibrations. Image size 740x640 nm. Shows the typical variation of terrace sizes you find on these samples.
-Temperature +
- +
-300deg C for deposition.  +
- +
-Current +
- +
-200 mA for 20 minutes, then 2 minutes 45 mA +
- +
-Voltage +
- +
-Around 500 / 380 +
- +
-O2 flow +
- +
-1 +
- +
-Heating/cooling rate +
- +
-Heating: Heat up before deposition to 450  to bake out the dirt from +
-chamber, holder & substrate. Radiative cooldown to 300 for deposition. +
-Anneal for 1-2hrs postdeposition at 300. Cooldown radiative by switching +
-off heat. +
- +
-and +
- +
- +
- +
-RMS roughness (and better roughness data if available) +
- +
-I think a picture says more than 1000 roughness values.. +
- +
- +
- +
-Picture: stm image in air, with a lot of vibrations. Image size 740x640 +
-nm. Shows the typical variation of terrace sizes you find on these +
-samples. +
- +
- +
- +
  
 Note 1: This recipe has been taken over (mutatis mutandis) from the Note 1: This recipe has been taken over (mutatis mutandis) from the
atc-1800.1675427601.txt.gz · Last modified: 2023/02/03 12:33 by scholma
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